%PDF-1.4
%????
1 0 obj
<<
/OpenAction 2 0 R
/Names 3 0 R
/Type /Catalog
/Metadata 4 0 R
/Pages 5 0 R
>>
endobj
6 0 obj
<<
/Application ('Certified by IEEE PDFeXpress at 07/28/2014 8:08:04 AM')
/IEEE#20Issue#20ID (6939760)
/Creator ('Certified by IEEE PDFeXpress at 07/28/2014 8:08:04 AM')
/Producer <4163726F6261742044697374696C6C657220382E312E30202857696E646F7773293B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/IEEE#20Article#20ID (6939983)
/Title (Elastomers for control of wafer temperature in the ≈50°C range during high dose ion implantation)
/IEEE#20Publication#20ID (6927586)
/Meeting#20Ending#20Date (4 July 2014)
/Meeting#20Starting#20Date (26 June 2014)
/Subject (2014 20th International Conference on Ion Implantation Technology \(IIT\);2014; ; ;10.1109/IIT.2014.6939983)
/ModDate (D:20181207024222-05'00')
/CreationDate (D:20140728080757-07'00')
>>
endobj
2 0 obj
<<
/D [7 0 R /FitH -32768]
/S /GoTo
>>
endobj
3 0 obj
<<
/EmbeddedFiles 8 0 R
>>
endobj
4 0 obj
<<
/Length 3480
/Type /Metadata
/Subtype /XML
>>
stream
application/pdfIEEE2014 20th International Conference on Ion Implantation Technology (IIT);2014; ; ;10.1109/IIT.2014.6939983elastomersheat transferhigh power implantationIR wafer temperature sensingElastomers for control of wafer temperature in the ≈50°C range during high dose ion implantationJeff SpringerWalt WrigginsJuergen KustererKarl ZotterMichael I. Current
2014 20th International Conference on Ion Implantation Technology (IIT)1 June 201410.1109/IIT.2014.69399834
endstream
endobj
5 0 obj
<<
/Type /Pages
/Count 4
/Kids [7 0 R 9 0 R 10 0 R 11 0 R]
>>
endobj
7 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R 20 0 R 21 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im0 23 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS0 [/Indexed /DeviceRGB 255 24 0 R]
>>
/Font <<
/TT2 25 0 R
/TT1 26 0 R
/TT0 27 0 R
/C2_0 28 0 R
/T1_0 29 0 R
/F6 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
8 0 obj
<<
/Kids [31 0 R]
>>
endobj
9 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [32 0 R 33 0 R 34 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im3 35 0 R
/Im1 36 0 R
/Im2 37 0 R
/Im0 38 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS1 [/Indexed /DeviceRGB 255 39 0 R]
/CS2 [/Indexed /DeviceRGB 255 40 0 R]
/CS0 [/Indexed /DeviceRGB 255 41 0 R]
>>
/Font <<
/TT1 42 0 R
/TT0 27 0 R
/C2_0 28 0 R
/F4 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
10 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [43 0 R 44 0 R 45 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im1 46 0 R
/Im0 47 0 R
>>
/ProcSet [/PDF /Text /ImageC]
/Font <<
/TT1 42 0 R
/TT0 27 0 R
/C2_0 28 0 R
/F4 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
11 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [48 0 R 49 0 R 50 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im3 51 0 R
/Im1 52 0 R
/Im2 53 0 R
/Im0 54 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS1 [/Indexed /DeviceRGB 255 55 0 R]
/CS2 [/Indexed /DeviceRGB 0 56 0 R]
/CS0 [/Indexed /DeviceRGB 255 57 0 R]
>>
/Font <<
/TT2 25 0 R
/TT1 42 0 R
/TT0 27 0 R
/TT3 58 0 R
/F5 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
12 0 obj
<<
/Length 10
/Filter /FlateDecode
>>
stream
x?+? ? |
endstream
endobj
13 0 obj
<<
/Length 965
/Filter /FlateDecode
>>
stream
H?lUo?6?*?' D)??C?bP?(?`4?v??R ??O???%?m@?O?????
??m4?F??*?-h??.?j ??? ?@????S???8U?P?^?????d)?0¶`?w??^le&??4Z?2qb???)?t????@?Y???:?k?A4?*?????~?z??\}????>?pZ?'??9??Δ??????`???x??Ws?Wc?*0?(?=mv?n??qh?????M???;?=?B?n???8????T?X&?JM?|VP=.t??l++`?4ຕI&??4)5Q?=,??????'?
mц??b?1?b0?q?*cX?*=????S??)?O????[R6X0Ϩ?+Mu???? ????W???ɑ?$E?6E??LJ?"????ī3uY??A%??9i}/??$GH:?AYv?2??c?a|&?L,0Z?bؤ??A?L?%?|V??Wղ^SS]?ʼn?3?a?/?????HŐ??,)?bX???}͖=|??P/???0D6?l>k??5?Ϋ?B?
??Q/???9L
d=?4??Y 2?>?ZyT????)U??n??2????:"?Np??>???ٌ<6=?x?ׯ m??dX?OٲHQ@Q?V?B?A??"? ?r?=?us???й?s?ɘ?ʤ?J?p???x??S??i?T:mH??M???0???^b?)S?s?o??H!N??x~??g?Rw?-`W??ф???a?`Ӵ???i ?[?m?`S??H?~?Z?
?+j_???POD??????????͌?T?R7???A?u?E0?W??????O????\?Y?HÌ\?L???#T?(?"?\E$n?7m?FM?f?7QU?/Ŗ??ChU?l?q?E2aK??5Q?D'?|??????K??W ?I44ᤂ/ijgt?GOG?3D??k??:?\{??1 i?? ?/?E
endstream
endobj
14 0 obj
<<
/Length 872
/Filter /FlateDecode
>>
stream
H?dUM??F?++E#???vs?H?@EI?>?n??B??ȿ/ߣ;?fH??H???$???.??t?I&͛Dy\?8???|???W???p??[}?&?Ľ??6?YT????mL??߇?EF:??,ԓ^??P?????M?????ga ?}??(????]ᕲ??e?U?g c?B?wc?
??P?%hI~P?^)y?????E???Sd?: >DUܧ??????s??
??????D??????lo?rFm?.O?Q?Gn??|F6?8????B???!?,X?eVWH??Ms\?????kQ f!h?+N?H???"?????8??T@????W????w?'??L>sie??)7??Da?-??d?v6?w?T[GYuW??*??iE?H9B??*??S?$+eM????wZ?)?Z??????4uWy????.?O3K{?????????^?o4?ș??$k??W0????(~m?i?_???ӒL?O?C%?V?]5H%?l|GV????Q??4???????'???/?˶?K???ш?t?7&zF?,
?#L????dߍ?,?m?2w?P鞙???gf???1?~??ߍ===???5?0M???5M???i?{???f??D????c?'G???t??E??iZn?s?j/NP?ֲ??1TJ.+?i??:????u1lF?????????h0P?????z?Ó??jxz??b??*?l?Ȳ??Ky?$o-??O?w?ᡩШ??^)?? h??2\l??;qw?U??AH??j?+ ?E?Ϳ(Dr+D(w??{5???q??eU? ? q,???6?v??^????z??N?>~P? m???
endstream
endobj
15 0 obj
<<
/Length 856
/Filter /FlateDecode
>>
stream
H?lUMo?0?+?N???b??^:`????? ?J?Չ?I????u3t@k????H1???q?%T7?J?,????j??"?.?ꖞLm#???
[??Gh&?lKCÖ?+1o?m??e?Č4ٜWb$5'^f&?^??????t?ɒ:A?X?}?٪?Gٚ??-?#?}?5??Ҝ?2EN?????{N?? ?p?$$?7,D?ϨK %JA????n?????2?FR ]??_ͯ86@,?a ?~?*fXCK?&?c(9?{?V?l?\???s?%????<[? o雍*??Ԍ???oFLWhfI?\#??x?֎s???xr??eM?0??v??K\???;??RV??D?bQ?5?lfZ?%*?;sZD??a?N??\?g?+???m+?d7?OM'????NB??}e??h?H???????q?Rz}I?}?Z?,It"-?%??M??"?!?]X?ZS*??b?%ư??S?A?i??R?o`\p??l?Q?EQ??"??^x)(??u?T{??A???
pff?2?N?q?#???u????8??>?????@[ ?TBGj??s ?˝?? (?????w]?9_vV??(?4 j??v8????\??+:J???vB???>?i?S??D?TJ?l?&?o?
27??ߠ?C9O??]???]á7???I?{L?3??D?R$??&??[????80ΒHheI0l?W~A~|?\??????-{?x>?us??"????#?)U????nI??h????