%PDF-1.6 %???? 1 0 obj << /Type /Catalog /Metadata 2 0 R /Pages 3 0 R >> endobj 4 0 obj << /IEEE#20Issue#20ID (8807892) /Creator (LaTeX with hyperref package) /Producer <7064665465582D312E34302E31393B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29> /IEEE#20Article#20ID (8807899) /Title (Wear and Ion Erosion in Spinning Disk Fences made with Al and Torlon) /IEEE#20Publication#20ID (8794648) /Meeting#20Ending#20Date (21 Sept. 2018) /Meeting#20Starting#20Date (16 Sept. 2018) /Subject (2018 22nd International Conference on Ion Implantation Technology \(IIT\);2018; ; ; ) /ModDate (D:20190820092511-04'00') /CreationDate (D:20190513170334+02'00') >> endobj 2 0 obj << /Length 3391 /Type /Metadata /Subtype /XML >> stream application/pdfIEEE2018 22nd International Conference on Ion Implantation Technology (IIT);2018; ; ; Torlon polyimidewafer fencesfixed restraintswear resistanceoptical profilometryWear and Ion Erosion in Spinning Disk Fences made with Al and TorlonWalt WrigginsDouglas HicksMichael Current 2018 22nd International Conference on Ion Implantation Technology (IIT)323 Sept. 2018325 endstream endobj 3 0 obj << /ITXT (2.1.7) /Type /Pages /Count 3 /Kids [5 0 R 6 0 R 7 0 R] >> endobj 5 0 obj << /CropBox [0 0 595.276 841.89] /Parent 3 0 R /Type /Page /Contents [8 0 R 9 0 R 10 0 R] /Resources 11 0 R /MediaBox [0 0 595.276 841.89] /Rotate 0 >> endobj 6 0 obj << /CropBox [0 0 595.276 841.89] /Parent 3 0 R /Type /Page /Contents [12 0 R 13 0 R 14 0 R] /Resources 15 0 R /MediaBox [0 0 595.276 841.89] /Rotate 0 >> endobj 7 0 obj << /CropBox [0 0 595.276 841.89] /Parent 3 0 R /Type /Page /Contents [16 0 R 17 0 R 18 0 R] /Resources 19 0 R /MediaBox [0 0 595.276 841.89] /Rotate 0 >> endobj 8 0 obj << /Length 10 /Filter /FlateDecode >> stream x?+??| endstream endobj 9 0 obj << /Length 265 /Filter /FlateDecode >> stream x?mP=O?0??+n`H;>{*????i???Pe????!-??????=K?@e(r?Ѝ?W????2?Ώ+omԻ?H??xM?????W?2{}??IYp?i??A!̀?H%J?ؗ?W??ejꌰ3p?T?Ψp?P?qK?? 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