W>648_wo>2331_word_end<_end702_wo>2331_word_end<_end
>2061_wo>2331_word_end<_end<4>2063_wo>2331_word_end<_end<
Xiaoshi Zhang, Eric Mountfo>2331_word_end<, Mat>2329_wo>2331_word_end<_end
>2071_wo>2331_word_end<_end<4>2073_wo>2331_word_end<_end<
>2100_wo>2331_word_end<_end<
>2101_wo>2331_word_end<_end< >2102_wo>2331_word_end<_end< >2103_wo>2331_word_end<_end<>2104_wo>2331_word_end<_end< >2105_wo>2331_word_end<_end<>2106_wo>2331_word_end<_end< >2107_wo>2331_word_end<_end< >2108_wo>2331_word_end<_end< >2109_wo>2331_word_end<_end<>2110_wo>2331_word_end<_end< >2111_wo>2331_word_end<_end<>2112_wo>2331_word_end<_end< >2113_wo>2331_word_end<_end<>2114_wo>2331_word_end<_end< >2115_wo>2331_word_end<_end<>2116_wo>2331_word_end<_end< or to enable >2102_wo>2331_word_end<_end< imaging wi>2329_wo>2331_word_end<_end< spatial resolution as high as 12 nm.>2106_wo>2331_word_end<_end<
>2119_wo>2331_word_end<_end<>2120_wo>2331_word_end<_end< >2121_wo>2331_word_end<_end< >2122_wo>2331_word_end<_end< >2123_wo>2331_word_end<_end< >2124_wo>2331_word_end<_end< >2125_wo>2331_word_end<_end< >2126_wo>2331_word_end<_end< of a source. Even >2329_wo>2331_word_end<_end >2128_wo>2331_word_end<_end<>2129_wo>2331_word_end<_end< >2130_wo>2331_word_end<_end<4>2132_wo>2331_word_end<_end<>2133_wo>2331_word_end<_end< >2134_wo>2331_word_end<_end<4>2136_wo>2331_word_end<_end<4 >2138_wo>2331_word_end<_end<
>2150_wo>2331_word_end<_end< >2151_wo>2331_word_end<_end<4>2153_wo>2331_word_end<_end<4>2155_wo>2331_word_end<_end<4>2157_wo>2331_word_end<_end<
>2164_wo>2331_word_end<_end<
The configuration used for testing is shown in >2150_wo>2331_word_end<_end< It consists of >2329_wo>2331_word_end<_end
>2171_wo>2331_word_end<_end<
The Coherent Astrella® amplifier laser system is an industrial-grade one-box ultrafast Ti:sapphire laser amplifier developed and constructed using H>626_wo>2331_word_end<_end
>2174_wo>2331_word_end<_end<4 ™
>2177_wo>2331_word_end<_end<4 ™ is a highly engineered HHG source and beamline system >2329_wo>2331_word_end<_end
>2182_wo>2331_word_end<_end<4 >2184_wo>2331_word_end<_end<4 ™ configuration and drive laser parameters, produces a >2102_wo>2331_word_end<_end< EUV or soft x-ray beam wi>2329_wo>2331_word_end<_end< waveleng>2329_wo>2331_word_end<_end< >2329_wo>2331_word_end<_end
>2200_wo>2331_word_end<_end< |
>2201_wo>2331_word_end<_end< |
>2202_wo>2331_word_end<_end< |
>2203_wo>2331_word_end<_end< |
>2204_wo>2331_word_end<_end< >2205_wo>2331_word_end<_end< >2206_wo>2331_word_end<_end< |
>2207_wo>2331_word_end<_end< >2208_wo>2331_word_end<_end< |
>2209_wo>2331_word_end<_end< |
>2210_wo>2331_word_end<_end< |
>2211_wo>2331_word_end<_end< |
>2212_wo>2331_word_end<_end< >2213_wo>2331_word_end<_end< |
>2214_wo>2331_word_end<_end< |
>2215_wo>2331_word_end<_end< |
>2216_wo>2331_word_end<_end<2) |
>2219_wo>2331_word_end<_end< |
>2220_wo>2331_word_end<_end< |
>2221_wo>2331_word_end<_end< |
>2222_wo>2331_word_end<_end<2 >2224_wo>2331_word_end<_end<0) |
>2227_wo>2331_word_end<_end< |
>2228_wo>2331_word_end<_end< |
<0.5% R>674_wo>2331_word_end<_end< for 8hrs |
>2232_wo>2331_word_end<_end< >2233_wo>2331_word_end<_end<4>2235_wo>2331_word_end<_end<
>2242_wo>2331_word_end<_end<2 >2244_wo>2331_word_end<_end<
>2257_wo>2331_word_end<_end<>2258_wo>2331_word_end<_end<11 >2260_wo>2331_word_end<_end<
>2267_wo>2331_word_end<_end<4>2269_wo>2331_word_end<_end< |
>2201_wo>2331_word_end<_end< |
>2271_wo>2331_word_end<_end< |
>2272_wo>2331_word_end<_end<11 >2274_wo>2331_word_end<_end< |
>2275_wo>2331_word_end<_end< |
>2276_wo>2331_word_end<_end<7 >2274_wo>2331_word_end<_end< |
>2279_wo>2331_word_end<_end< |
>2280_wo>2331_word_end<_end< >2281_wo>2331_word_end<_end< |
>2282_wo>2331_word_end<_end< |
>2283_wo>2331_word_end<_end< |
>2228_wo>2331_word_end<_end< |
<6.5 % R>674_wo>2331_word_end<_end< for 1 hour |
>2288_wo>2331_word_end<_end< Observed >2267_wo>2331_word_end<_end<4>2291_wo>2331_word_end<_end<
>2298_wo>2331_word_end<_end<
As a collaborative effort, KMLabs and Coherent conducted HHG measurements at Coherent’s facility in Santa Clara, using a production Astrella® laser and >2267_wo>2331_word_end<_end<4™. After initial characterization of >2329_wo>2331_word_end<_end
We evaluated >2329_wo>2331_word_end<_end
>2305_wo>2331_word_end<_end<
>2318_wo>2331_word_end<_end< Stability of >2267_wo>2331_word_end<_end<4>2321_wo>2331_word_end<_end<
The EUV spectrum obtained for case a) and b) are shown in >2257_wo>2331_word_end<_end< and Figure 4 respectively, while >2329_wo>2331_word_end<_end In setting-up experiments using EUV light, >2329_wo>2331_word_end<_end Figure 4 shows >2329_wo>2331_word_end<_end 2329_wo>2331_word_end<_endThe specifics of >2329_wo>2331_word_end<_end
Figure 4. Generation of 13.5 nm EUV using >2329_wo>2331_word_end<_end
Summary and 우리카지노 바카라사이트nclusions
The >2267_wo>2331_word_end<_end<4™ system is >2329_wo>2331_word_end<_end
References
1. A Rundquist, CG Durfee, 3>2331_word_end<, Z Chang, C Herne, S Backus, MM Murnane, and HC Kapteyn, "Phasematched generation of >2102_wo>2331_word_end<_end< soft X-rays," Science 280(5368), 1412-1415 (1998).
2. DF Ga>2331_word_end
3. E Gagnon, P Ran우리카지노 바카라사이트ovic, A Paul, CL Cocke, MM Murnane, HC Kapteyn, and AS Sandhu, "Soft x-ray driven femtosecond molecular dynamics," Science 317(5843), 1374-1378 (2007).
4. D Rudolf, C La-O-Vorakiat, M Battiato, R Adam, JM Shaw, E Turgut, P Maldonado, S Ma>2329_wo>2331_word_end<_end
5. S Ma>2329_wo>2331_word_end<_end
6. C Chen, ZS Tao, A Carr, P Matyba, T Szilvasi, S Emmerich, M Piecuch, M Keller, D Zusin, S Eich, M Rollinger, WJ Youa, S Ma>2329_wo>2331_word_end<_end
7. KM Hoogeboom-Pot, E Turgut, JN Hernandez-Charpak, JM Shaw, HC Kapteyn, MM Murnane, and D Na>2331_word_end2329_wo>2331_word_end<_end 8. KM Hoogeboom-Pot, JN Hernandez-Charpak, X Gu, TD Frazer, EH Anderson, W Chao, RW Falcone, R Yang, MM Murnane, HC Kapteyn, and D Na>2331_word_end2329_wo>2331_word_end<_end 9. S Eich, A Stange, AV Carr, J Urbancic, T Popmintchev, M Wiesenmayer, K Jansen, A Ruffing, S Jakobs, T Rohwer, S Hellmann, C Chen, P Matyba, L Kipp, K Rossnagel, M Bauer, MM Murnane, HC Kapteyn, S Ma>2329_wo>2331_word_end<_end 10. D Popmintchev, C Hernandez-Garcia, F Dollar, C Mancuso, JA Perez-Hernandez, M-C Chen, A Hankla, X Gao, B Shim, >626_wo>2331_word_end<_end< Gaeta, M Tarazkar, DA Romanov, RJ Levis, JA Gaffney, M Foo>2331_word_end<, SB Libby, A JaronBecker, A Becker, L Plaja, MM Murnane, HC Kapteyn, and T Popmintchev, "Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas," Science 350(6265), 1225- 1231 (2015). 11. T Popmintchev, M-C Chen, D Popmintchev, P Arpin, S Brown, S Ališauskas, G Andriukaitis, T Balčiunas, OD Mü cke, A Pugzlys, A Baltuška, B Shim, SE Schrau>2329_wo>2331_word_end<_end<, A Gaeta, C Hernández-García, L Plaja, A Becker, A Jaron-Becker, MM Murnane, and HC Kapteyn, "Bright Coherent Ultrahigh Harmonics in >2329_wo>2331_word_end<_end 12. JL Krause, KJ Schafer, and KC Kulander, ">648_wo>2331_word_end<_end 13. CG Durfee III, A Rundquist, HC Kapteyn, and MM Murnane, "Guided wave me>2329_wo>2331_word_end<_end 14. T Popmintchev, D Popmintchev, MM Murnane, and H Kapteyn, "Me>2329_wo>2331_word_end<_end 15. TV Popmintchev, DV Popmintchev, MM Murnane, and HC Kapteyn, "Generation of VUV, EUV, and Xray Light Using VUV-UV-VIS >797_wo>2331_word_end<_end<," (Google Patents, 2017). 16. KMLabs, ">2267_wo>2331_word_end<_end<™ Coherent EUV and Soft X-Ray Source" (2017), retrieved 11/12/2017, https://kmlabs.com/product/xuus/.
Appendix A: EUV flux measurement me>2329_wo>2331_word_end<_end
To accurately measure HHG flux, KMLabs used >2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_endall background light from impinging on >2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end< at >2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end< of 800 nm, and at harmonic waveleng>2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end< >2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end2331_word_end
To accurately measure HHG flux, KMLabs used >2329_wo>2331_word_end<_end 2329_wo>2331_word_end<_end2329_wo>2331_word_end<_end
Figure 5: Modular beamline configuration used for >2329_wo>2331_word_end<_end
In >2329_wo>2331_word_end<_end Two filters are used to avoid any 800 nm leakage >2329_wo>2331_word_end<_end
Element |
Throughput at 35 우리카지노 바카라사이트 |
VBS (2X), IR EUV beam separator module, to absorb 800 우리카지노 바카라사이트 while reflecting EUV. |
~70% each |
Aluminum filters (2X), 1000 nm and 200 nm >2329_wo>2331_word_end<_end |
1.8% (1000 우리카지노 바카라사이트) 20% (200 우리카지노 바카라사이트) |
A toroidal refoc우리카지노 바카라사이트 mirror |
~70% |
Diffraction grating (+1 o>2331_word_end |
~16% |
Total beamline >2329_wo>2331_word_end<_end |
0.02% |
Total beamline >2329_wo>2331_word_end<_end |
5.5% |
Table 3: Beamline configuration and >2329_wo>2331_word_end<_end
Element |
Throughput at 13.5 우리카지노 바카라사이트 |
VBS (2X) |
~70% each |
Zir우리카지노 바카라사이트nium filters (2X) |
18% (200 우리카지노 바카라사이트) 16% (200 우리카지노 바카라사이트) |
Toroidal refoc우리카지노 바카라사이트 mirror |
~70% |
Diffraction grating (+1 o>2331_word_end |
~28% |
Total beamline >2329_wo>2331_word_end<_end |
0.28% |
Total beamline >2329_wo>2331_word_end<_end |
10% |
Table 4: Beamline configuration and >2329_wo>2331_word_end<_end