W>648_wo>2026_word_end<_end702_wo>2026_word_end<_end
>1756_wo>2026_word_end<_end<4>1758_wo>2026_word_end<_end<
Xiaoshi Zhang, Eric Mountfo>2026_word_end<, Mat>2024_wo>2026_word_end<_end
>1766_wo>2026_word_end<_end<4>1768_wo>2026_word_end<_end<
>1795_wo>2026_word_end<_end<
>1796_wo>2026_word_end<_end< >1797_wo>2026_word_end<_end< >1798_wo>2026_word_end<_end<>1799_wo>2026_word_end<_end< >1800_wo>2026_word_end<_end<>1801_wo>2026_word_end<_end< >1802_wo>2026_word_end<_end< >1803_wo>2026_word_end<_end< >1804_wo>2026_word_end<_end<>1805_wo>2026_word_end<_end< >1806_wo>2026_word_end<_end<>1807_wo>2026_word_end<_end< >1808_wo>2026_word_end<_end<>1809_wo>2026_word_end<_end< >1810_wo>2026_word_end<_end<>1811_wo>2026_word_end<_end< or to enable >1797_wo>2026_word_end<_end< imaging wi>2024_wo>2026_word_end<_end< spatial resolution as high as 12 nm.>1801_wo>2026_word_end<_end<
>1814_wo>2026_word_end<_end<>1815_wo>2026_word_end<_end< >1816_wo>2026_word_end<_end< >1817_wo>2026_word_end<_end< >1818_wo>2026_word_end<_end< >1819_wo>2026_word_end<_end< >1820_wo>2026_word_end<_end< >1821_wo>2026_word_end<_end< of a source. Even >2024_wo>2026_word_end<_end >1823_wo>2026_word_end<_end<>1824_wo>2026_word_end<_end< >1825_wo>2026_word_end<_end<4>1827_wo>2026_word_end<_end<>1828_wo>2026_word_end<_end< >1829_wo>2026_word_end<_end<4>1831_wo>2026_word_end<_end<4 >1833_wo>2026_word_end<_end<
>1845_wo>2026_word_end<_end< >1846_wo>2026_word_end<_end<4>1848_wo>2026_word_end<_end<4>1850_wo>2026_word_end<_end<4>1852_wo>2026_word_end<_end<
>1859_wo>2026_word_end<_end<
The configuration used for testing is shown in >1845_wo>2026_word_end<_end< It consists of >2024_wo>2026_word_end<_end
>1866_wo>2026_word_end<_end<
The Coherent Astrella® amplifier laser system is an industrial-grade one-box ultrafast Ti:sapphire laser amplifier developed and constructed using H>626_wo>2026_word_end<_end
>1869_wo>2026_word_end<_end<4 ™
>1872_wo>2026_word_end<_end<4 ™ is a highly engineered HHG source and beamline system >2024_wo>2026_word_end<_end
>1877_wo>2026_word_end<_end<4 >1879_wo>2026_word_end<_end<4 ™ configuration and drive laser parameters, produces a >1797_wo>2026_word_end<_end< EUV or soft x-ray beam wi>2024_wo>2026_word_end<_end< waveleng>2024_wo>2026_word_end<_end< >2024_wo>2026_word_end<_end
>1895_wo>2026_word_end<_end< |
>1896_wo>2026_word_end<_end< |
>1897_wo>2026_word_end<_end< |
>1898_wo>2026_word_end<_end< |
>1899_wo>2026_word_end<_end< >1900_wo>2026_word_end<_end< >1901_wo>2026_word_end<_end< |
>1902_wo>2026_word_end<_end< >1903_wo>2026_word_end<_end< |
>1904_wo>2026_word_end<_end< |
>1905_wo>2026_word_end<_end< |
>1906_wo>2026_word_end<_end< |
>1907_wo>2026_word_end<_end< >1908_wo>2026_word_end<_end< |
>1909_wo>2026_word_end<_end< |
>1910_wo>2026_word_end<_end< |
>1911_wo>2026_word_end<_end<2) |
>1914_wo>2026_word_end<_end< |
>1915_wo>2026_word_end<_end< |
>1916_wo>2026_word_end<_end< |
>1917_wo>2026_word_end<_end<2 >1919_wo>2026_word_end<_end<0) |
>1922_wo>2026_word_end<_end< |
>1923_wo>2026_word_end<_end< |
<0.5% R>674_wo>2026_word_end<_end< for 8hrs |
>1927_wo>2026_word_end<_end< >1928_wo>2026_word_end<_end<4>1930_wo>2026_word_end<_end<
>1937_wo>2026_word_end<_end<2 >1939_wo>2026_word_end<_end<
>1952_wo>2026_word_end<_end<>1953_wo>2026_word_end<_end<11 >1955_wo>2026_word_end<_end<
>1962_wo>2026_word_end<_end<4>1964_wo>2026_word_end<_end< |
>1896_wo>2026_word_end<_end< |
>1966_wo>2026_word_end<_end< |
>1967_wo>2026_word_end<_end<11 >1969_wo>2026_word_end<_end< |
>1970_wo>2026_word_end<_end< |
>1971_wo>2026_word_end<_end<7 >1969_wo>2026_word_end<_end< |
>1974_wo>2026_word_end<_end< |
>1975_wo>2026_word_end<_end< >1976_wo>2026_word_end<_end< |
>1977_wo>2026_word_end<_end< |
>1978_wo>2026_word_end<_end< |
>1923_wo>2026_word_end<_end< |
<6.5 % R>674_wo>2026_word_end<_end< for 1 hour |
>1983_wo>2026_word_end<_end< Observed >1962_wo>2026_word_end<_end<4>1986_wo>2026_word_end<_end<
>1993_wo>2026_word_end<_end<
As a collaborative effort, KMLabs and Coherent conducted HHG measurements at Coherent’s facility in Santa Clara, using a production Astrella® laser and >1962_wo>2026_word_end<_end<4™. After initial characterization of >2024_wo>2026_word_end<_end
We evaluated >2024_wo>2026_word_end<_end
>2000_wo>2026_word_end<_end<
>2013_wo>2026_word_end<_end< Stability of >1962_wo>2026_word_end<_end<4>2016_wo>2026_word_end<_end<
The EUV spectrum obtained for case a) and b) are shown in >1952_wo>2026_word_end<_end< and Figure 4 respectively, while >2024_wo>2026_word_end<_end In setting-up experiments using EUV light, >2024_wo>2026_word_end<_end Figure 4 shows >2024_wo>2026_word_end<_end 2024_wo>2026_word_end<_endThe specifics of >2024_wo>2026_word_end<_end
Figure 4. Generation of 13.5 nm EUV using >2024_wo>2026_word_end<_end
Summary and 우리카지노 바카라사이트nclusions
The >1962_wo>2026_word_end<_end<4™ system is >2024_wo>2026_word_end<_end
References
1. A Rundquist, CG Durfee, 3>2026_word_end<, Z Chang, C Herne, S Backus, MM Murnane, and HC Kapteyn, "Phasematched generation of >1797_wo>2026_word_end<_end< soft X-rays," Science 280(5368), 1412-1415 (1998).
2. DF Ga>2026_word_end
3. E Gagnon, P Ran우리카지노 바카라사이트ovic, A Paul, CL Cocke, MM Murnane, HC Kapteyn, and AS Sandhu, "Soft x-ray driven femtosecond molecular dynamics," Science 317(5843), 1374-1378 (2007).
4. D Rudolf, C La-O-Vorakiat, M Battiato, R Adam, JM Shaw, E Turgut, P Maldonado, S Ma>2024_wo>2026_word_end<_end
5. S Ma>2024_wo>2026_word_end<_end
6. C Chen, ZS Tao, A Carr, P Matyba, T Szilvasi, S Emmerich, M Piecuch, M Keller, D Zusin, S Eich, M Rollinger, WJ Youa, S Ma>2024_wo>2026_word_end<_end
7. KM Hoogeboom-Pot, E Turgut, JN Hernandez-Charpak, JM Shaw, HC Kapteyn, MM Murnane, and D Na>2026_word_end2024_wo>2026_word_end<_end 8. KM Hoogeboom-Pot, JN Hernandez-Charpak, X Gu, TD Frazer, EH Anderson, W Chao, RW Falcone, R Yang, MM Murnane, HC Kapteyn, and D Na>2026_word_end2024_wo>2026_word_end<_end 9. S Eich, A Stange, AV Carr, J Urbancic, T Popmintchev, M Wiesenmayer, K Jansen, A Ruffing, S Jakobs, T Rohwer, S Hellmann, C Chen, P Matyba, L Kipp, K Rossnagel, M Bauer, MM Murnane, HC Kapteyn, S Ma>2024_wo>2026_word_end<_end 10. D Popmintchev, C Hernandez-Garcia, F Dollar, C Mancuso, JA Perez-Hernandez, M-C Chen, A Hankla, X Gao, B Shim, >626_wo>2026_word_end<_end< Gaeta, M Tarazkar, DA Romanov, RJ Levis, JA Gaffney, M Foo>2026_word_end<, SB Libby, A JaronBecker, A Becker, L Plaja, MM Murnane, HC Kapteyn, and T Popmintchev, "Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas," Science 350(6265), 1225- 1231 (2015). 11. T Popmintchev, M-C Chen, D Popmintchev, P Arpin, S Brown, S Ališauskas, G Andriukaitis, T Balčiunas, OD Mü cke, A Pugzlys, A Baltuška, B Shim, SE Schrau>2024_wo>2026_word_end<_end<, A Gaeta, C Hernández-García, L Plaja, A Becker, A Jaron-Becker, MM Murnane, and HC Kapteyn, "Bright Coherent Ultrahigh Harmonics in >2024_wo>2026_word_end<_end 12. JL Krause, KJ Schafer, and KC Kulander, ">648_wo>2026_word_end<_end 13. CG Durfee III, A Rundquist, HC Kapteyn, and MM Murnane, "Guided wave me>2024_wo>2026_word_end<_end 14. T Popmintchev, D Popmintchev, MM Murnane, and H Kapteyn, "Me>2024_wo>2026_word_end<_end 15. TV Popmintchev, DV Popmintchev, MM Murnane, and HC Kapteyn, "Generation of VUV, EUV, and Xray Light Using VUV-UV-VIS >1006_wo>2026_word_end<_end<," (Google Patents, 2017). 16. KMLabs, ">1962_wo>2026_word_end<_end<™ Coherent EUV and Soft X-Ray Source" (2017), retrieved 11/12/2017, https://kmlabs.com/product/xuus/.
Appendix A: EUV flux measurement me>2024_wo>2026_word_end<_end
To accurately measure HHG flux, KMLabs used >2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_endall background light from impinging on >2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end< at >2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end< of 800 nm, and at harmonic waveleng>2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end< >2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end2026_word_end
To accurately measure HHG flux, KMLabs used >2024_wo>2026_word_end<_end 2024_wo>2026_word_end<_end2024_wo>2026_word_end<_end
Figure 5: Modular beamline configuration used for >2024_wo>2026_word_end<_end
In >2024_wo>2026_word_end<_end Two filters are used to avoid any 800 nm leakage >2024_wo>2026_word_end<_end
Element |
Throughput at 35 우리카지노 바카라사이트 |
VBS (2X), IR EUV beam separator module, to absorb 800 우리카지노 바카라사이트 while reflecting EUV. |
~70% each |
Aluminum filters (2X), 1000 nm and 200 nm >2024_wo>2026_word_end<_end |
1.8% (1000 우리카지노 바카라사이트) 20% (200 우리카지노 바카라사이트) |
A toroidal refoc우리카지노 바카라사이트 mirror |
~70% |
Diffraction grating (+1 o>2026_word_end |
~16% |
Total beamline >2024_wo>2026_word_end<_end |
0.02% |
Total beamline >2024_wo>2026_word_end<_end |
5.5% |
Table 3: Beamline configuration and >2024_wo>2026_word_end<_end
Element |
Throughput at 13.5 우리카지노 바카라사이트 |
VBS (2X) |
~70% each |
Zir우리카지노 바카라사이트nium filters (2X) |
18% (200 우리카지노 바카라사이트) 16% (200 우리카지노 바카라사이트) |
Toroidal refoc우리카지노 바카라사이트 mirror |
~70% |
Diffraction grating (+1 o>2026_word_end |
~28% |
Total beamline >2024_wo>2026_word_end<_end |
0.28% |
Total beamline >2024_wo>2026_word_end<_end |
10% |
Table 4: Beamline configuration and >2024_wo>2026_word_end<_end